The vacuum module and its variants for some
materials in some vacuum-deposited on an
area of the substrate, the substrate comprises
three dimensional pieces, with the aim of
its front surface a multilayer coating film,
and the vacuum module can be used in vacuum
systems. HTC vacuum complies with the customers
requirements to proceed the design of the
customized modules. The module will be assembled
and tested by HTC. The customized modules
usually integrate the vacuum chamber, frame,
vacuum pump, vacuum piping, and control system.
The function of modules can be vacuum exhaust,
substrate degassing, or products inspection
in vacuum environment etc. HTC vacuum is
able to supply a module tailored to customer's
specifications. The advantages of HTC for
vacuum chambers:
1. HTC vacuum has the extensive experience in
vacuum industry.
2. Stock vacuum components, such as flanges,
fittings and valves, are ready for chamber
manufacturing.
3. Excellent machining ability and enough space
for chamber manufacturing. Plate cutting,
machining, welding, cleaning, assembly, and
leak test all can be done in house.
4. Pumping system is all set for chamber pumping
and leak testing, and HTCs own pump service
teams can offer any assist in case.
